- Used in combination with the SWGm wafer grippers
Product Highlights
- Controlled discharge of sucked air (optional) prevents contamination of the process area
- Flange modules enable flexible connection to different robot connections and fast gripper change
- Gentle handling and precise positioning with the suction/damping module
- Holder system HTR for mounting sensors for distance measurement and occupancy testing
- Micro valves prevent delays thanks to compressed air control directly at the vacuum generator